TEMPERATURE RESPONSE OF SILICON MEMS CANTILEVERS DURING AND AFTER Nd:YAG LASER IRRADIATION

Author: Rogers James   Phinney Leslie  

Publisher: Taylor & Francis Ltd

ISSN: 1521-0634

Source: Numerical Heat Transfer Part A: Applications, Vol.45, Iss.8, 2004-05, pp. : 737-750

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Abstract