Application of Reproducing the Kernel Particle Method on the Simulation of the Membrane of a Capacitive Micromachined Microphone in Viscothermal Air

Author: Yang Cheng-Ta  

Publisher: Taylor & Francis Ltd

ISSN: 1521-0634

Source: Numerical Heat Transfer Part A: Applications, Vol.63, Iss.2, 2013-01, pp. : 120-143

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