High-Precision Combinatorial Deposition of Micro Particle Patterns on a Microelectronic Chip
Author： Loffler F.
Publisher： Taylor & Francis Ltd
ISSN： 1521-7388
Source： Aerosol Science and Technology, Vol.45, Iss.1, 2010-12, pp. : 65-74
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Access to resources
Recommend
