Creating Three‐Dimensional Polymeric Microstructures by Multi‐Beam Interference Lithography

Author: Hyuk Moon Jun   Yang Shu  

Publisher: Taylor & Francis Ltd

ISSN: 1532-1797

Source: Journal of Macromolecular Science, Part C: Polymer Reviews, Vol.45, Iss.4, 2005-01, pp. : 351-373

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Abstract