Modification of Si(100) surface by plasma-enhanced graft polymerization of allylpentafluorobenzene

Author： Zou X. P.   Kang E. T.   Neoh K. G.   Huang Wei  

Publisher： Taylor & Francis Ltd

ISSN： 1568-5616

Source： Journal of Adhesion Science and Technology, Vol.15, Iss.13, 2001-12, pp. : 1655-1672

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