Adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test

Author： Goh L. L. N.   Toh S. L.   Chooi S. Y.M.   Tay T. E.  

Publisher： Taylor & Francis Ltd

ISSN： 1568-5616

Source： Journal of Adhesion Science and Technology, Vol.16, Iss.6, 2002-05, pp. : 729-744

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