Surface-forces-driven instability of comb-drive microcantilevers in MEMS

Author: Zhu J.   Ru C. Q.   Mioduchowski A.  

Publisher: Taylor & Francis Ltd

ISSN: 1568-5616

Source: Journal of Adhesion Science and Technology, Vol.20, Iss.10, 2006-07, pp. : 1125-1146

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Abstract