Optimal design of induction heating equipment for high-speed processing of a semiconductor

Author: Okamoto Yoshifumi   Imai Toshio   Miyagi Daisuke   Takahashi Norio   Ozaki Kazuhiro   Ono Hiroshi   Uchida Naoki  

Publisher: Emerald Group Publishing Ltd

ISSN: 0332-1649

Source: COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol.23, Iss.4, 2004-12, pp. : 1045-1052

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