NF3 Treatment by Ferroelectric Packed-Bed Plasma Reactor

Author: Yamamoto Toshiaki   Chang J. S.   Kostov K.   Okayasu Y.   Kato T.   Iwaizumi T.   Yoshimura K.  

Publisher: Science and Technology Network Inc.

ISSN: 1203-8407

Source: Journal of Advanced Oxidation Technologies, Vol.4, Iss.4, 1999-11, pp. : 454-457

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