Effect of Ammonia Addition on Photo-Resist Removal Characteristics by Ozone/Water Vapor Treatments

Author: Noda Seiji   Horibe Hideo   Kawase Kazumasa   Miyamoto Makoto   Kuzumoto Masaki   Kataoka Tatsuo  

Publisher: Science and Technology Network Inc.

ISSN: 1203-8407

Source: Journal of Advanced Oxidation Technologies, Vol.6, Iss.2, 2003-07, pp. : 132-142

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