Scanning probe microscopy for silicon device fabrication

Author: Simmons M.Y.   Ruess F.J.   Goh K.E.J.   Hallam T.   Schofield S.R.   Oberbeck L.   Curson N.J.   Hamilton A.R.   Butcher M.J.   Clark R.G.   Reusch T.C.G.  

Publisher: Taylor & Francis Ltd

ISSN: 0892-7022

Source: Molecular Simulation, Vol.31, Iss.6-7, 2005-05, pp. : 505-515

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Abstract