Prepared Low Stress Cubic Boron Nitride Film by Physical Vapor Deposition

Author： Zhu P.W.   Zhao Y.N.   Wang B.   He Z.   Li D.M.   Zou G.T.  

Publisher： Academic Press

ISSN： 0022-4596

Source： Journal of Solid State Chemistry, Vol.167, Iss.2, 2002-09, pp. : 420-424

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Exploration of Growth Window for Phase-Pure Cubic Boron Nitride Films Prepared in a Pure N2 Plasma

By Gao Wei   Li Yujing   Zhang Yuyuan   Yin Hong  

Coatings, Vol. 8, Iss. 2, 2018-02 ,pp. : 82-82

MDPI

Access to resources Recommend Favorite

Solid oxide fuel cells with film electrolytes prepared by chemical vapor deposition

By Bobrenok O.   Predtechenskii M.  

Russian Journal of Electrochemistry, Vol. 46, Iss. 7, 2010-07 ,pp. : 798-804

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Boron Nitride Films Prepared by MOCVD

By Nakamura K.   Sasaki T.  

Journal of Solid State Chemistry, Vol. 154, Iss. 1, 2000-10 ,pp. : 101-106

Academic Press

Access to resources Recommend Favorite

Controlled Synthesis of Atomically Layered Hexagonal Boron Nitride via Chemical Vapor Deposition

By Liu Juanjuan   Kutty R. Govindan   Liu Zheng  

Molecules, Vol. 21, Iss. 12, 2016-11 ,pp. : 1636-1636

MDPI

Access to resources Recommend Favorite

Raman scattering of light in doped cubic boron nitride

By Shishonok E.  

Journal of Applied Spectroscopy, Vol. 71, Iss. 6, 2004-11 ,pp. : 880-887

Springer Publishing Company

Access to resources Recommend Favorite