Nanolithography with an atomic force microscope

Author: Wendel M.   Irmer B.   Cortes J.   Kaiser R.   Lorenz H.   Kotthaus J.P.   Lorke A.   Williams E.  

Publisher: Academic Press

ISSN: 0749-6036

Source: Superlattices and Microstructures, Vol.20, Iss.3, 1996-10, pp. : 349-356

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract