Dopant patterning in three dimensions during molecular beam epitaxial growth using an in-situ focused ion gun

Author： Sazio P.J.A.   Thompson J.H.   Jones G.A.C.   Linfield E.H.   Ritchie D.A.   Houlton M.   Smith G.W.  

Publisher： Academic Press

ISSN： 0749-6036

Source： Superlattices and Microstructures, Vol.20, Iss.4, 1996-12, pp. : 535-544

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