Silicon pressure sensors with a thick film periphery

Author: Belaviˇc Darko   ˇSoba Stojan   Pavlin Marko   Roˇcak Dubravka   Hrovat Marko  

Publisher: Emerald Group Publishing Ltd

ISSN: 1356-5362

Source: Microelectronics International, Vol.15, Iss.3, 1998-03, pp. : 26-30

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Abstract