Parameters affecting the sensitivity of LTCC pressure sensors

Author： Radosavljevic Goran J.   Smetana Walter   Maric Andrea M.   Živanov Ljiljana D.   Unger Michael   Stangl Günther  

Publisher： Emerald Group Publishing Ltd

ISSN： 1356-5362

Source： Microelectronics International, Vol.27, Iss.3, 2010-01, pp. : 159-165

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