FIB/HVEM observation of the configuration of cracks and the defect structure near the cracks in Si

Author: Saka H.   Abe S.  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.46, Iss.1, 1997-01, pp. : 45-57

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract