Lattice parameter determination of a composition controlled Si 1−x Ge x layer on a Si (001) substrate using convergent-beam electron diffraction

Author: Akaogi Takayuki   Tsuda Kenji   Terauchi Masami   Tanaka Michiyoshi  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.53, Iss.6, 2004-12, pp. : 593-600

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Abstract