Evolutionary computation applied to the reconstruction of 3-D surface topography in the SEM

Author： Kodama Tetsuji   Li Xiaoyuan   Nakahira Kenji   Ito Dai  

Publisher： Oxford University Press

ISSN： 0022-0744

Source： Journal of Electron Microscopy, Vol.54, Iss.5, 2005-10, pp. : 429-435

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