Effect of annealing on the structural and optical properties of sputtered HfN x thin films

Author: Gueddaoui H.   Schmerber G.  

Publisher: Inderscience Publishers

ISSN: 1753-2507

Source: International Journal of Nanoparticles, Vol.6, Iss.2-3, 2013-06, pp. : 161-168

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Abstract