Microchannel formation in fused silica during ArF excimer laser irradiation

Author： Burkert A.   Triebel W.   Natura U.   Martin R.  

Publisher： Society of Glass Technology

ISSN： 0031-9090

Source： Physics and Chemistry of Glasses - European Journal of Glass Science and Technology Part B, Vol.48, Iss.3, 2007-06, pp. : 107-112

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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