Carbon Measurement in Thin Silicon Wafers (∼400 μm) by Infrared Absorption Spectrometry

Author: Leroueille J.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.36, Iss.2, 1982-03, pp. : 153-155

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract