Investigations of a Metastable Dependence on the Ionization of Sputtered Species in Neon Glow Discharges

Author： Serxner D. Smith R. L. Hess K. R.

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.45, Iss.10, 1991-12, pp. : 1656-1664

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