Detection of Trace Concentrations of Column III and V Hydrides by Laser-Induced Breakdown Spectroscopy

Author: Cheng E. A. P.   Fraser R. D.   Eden J. G.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.45, Iss.6, 1991-07, pp. : 949-952

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Abstract

The measurement of trace concentrations (1–400 ppm) of polyatomic molecular impurities in helium was investigated by laser-induced breakdown spectroscopy (LIBS). For the Column III and V hydrides such as B2 H6, PH3, and AsH3, the detectability limits with the present apparatus were determined to be 1, 3, and ∼1 ppm, respectively. It is expected that resorting to synchronous detection techniques will improve the sensitivity of LIBS for this application by as much as an order of magnitude.

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