Quantitative Infrared Emission Spectroscopy of Phosphosilicate Glass on Silicon Wafers Using Multivariate Calibration

Author: Wangmaneerat B.   Mcguire J. A.   Niemczyk T. M.   Haaland D. M.   Linn J. H.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.46, Iss.2, 1992-02, pp. : 340-344

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