Mass Spectrometry Study of a Magnetron Planar Glow Discharge Excited in the Direct-Current and in the Radio-Frequency Mode: An Experimental Design Approach

Author： Molle Christel   Springael Sabine   Wautelet Michel   Dauchot Jean-Pierre   Hecq Michel  

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.49, Iss.7, 1995-07, pp. : 872-879

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