Characterization of Tantalum Films on Analytical Surfaces: Insights into Sputtering of Nonconductors in a Direct-Current Glow Discharge Using Secondary Cathodes

Author： Wayne David M.   Schulze Roland K.   Maggiore Carl   Cooke D. Wayne   Havrilla George  

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.53, Iss.3, 1999-03, pp. : 266-277

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