Effect of Optical Interference on Borophosphosilicate Glass Profiles Obtained with a Glow Discharge Optical Emission Spectrometer

Author： Kimura Shigeharu Mitsui Yasuhiro

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.55, Iss.3, 2001-03, pp. : 292-297

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