IR and EPR Study of the Na Ion-Implanted SiO2/Si System

Author： Nagai N.   Yamaguchi Y.   Saito R.   Hayashi S.   Kudo M.  

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.55, Iss.9, 2001-09, pp. : 1207-1213

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