Spectral Sharpening Algorithm for a Polychromatic Reflectometer in the Extreme Ultraviolet

Author： Banyay M.   Juschkin L.  

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.64, Iss.4, 2010-04, pp. : 401-408

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