An instrument transfer function approach to atomic force microscopy for surface metrology

Author: Burns Daniel J.   Shilpiekandula Vijay   Youcef-Toumi Kamal  

Publisher: Inderscience Publishers

ISSN: 1746-9392

Source: International Journal of Nanomanufacturing, Vol.6, Iss.1-4, 2010-08, pp. : 376-394

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