Material aspects for the diamond machining of submicron optical structures for UV-application

Author： Brinksmeier Ekkard   Riemer Oltmann   Glabe Ralf   Meier Axel  

Publisher： Inderscience Publishers

ISSN： 1746-9392

Source： International Journal of Nanomanufacturing, Vol.7, Iss.1, 2011-05, pp. : 63-72

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