Surface formation characteristics in elliptical ultrasonic assisted grinding of monocrystal silicon

Author: Lin Yongbo Wu; Zhiqiang Liang; Masakazu Fujimoto; Weimin  

Publisher: Inderscience Publishers

ISSN: 1746-9392

Source: International Journal of Nanomanufacturing, Vol.7, Iss.3-4, 2011-09, pp. : 189-198

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