Design and cooperation control analysis of a coarse-fine dual stage drive positioning system

Author： Ju Bai Xiaolong; Fang Fei; Lei Yong; Bing-Feng  

Publisher： Inderscience Publishers

ISSN： 1746-9392

Source： International Journal of Nanomanufacturing, Vol.7, Iss.3-4, 2011-09, pp. : 232-244

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