Deposition and characterisation of ultralow-stress ZnO thin films for application in FBAR-based gravimetric biosensors

Author： Zhang L. García-Gancedo; G.M. Ashley; X.B. Zhao; J. Pedrós; A.J. Flewitt; W.I. Milne; J.K. Luo; J.R. Lu; C.J.B. Ford; D.

Publisher： Inderscience Publishers

ISSN： 1746-9392

Source： International Journal of Nanomanufacturing, Vol.7, Iss.3-4, 2011-09, pp. : 371-382

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