Grain exfoliation and control thereof in ultra-precision plane honing of AlN substrates

Author: Suzuki Shinya   Kuriyagawa Tsunemoto   Yan Jiwang   Yoshihara Nobuhito  

Publisher: Inderscience Publishers

ISSN: 1748-5711

Source: International Journal of Machining and Machinability of Materials, Vol.2, Iss.1, 2007-03, pp. : 37-49

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