Silicon Subminiature Microphones for Airborne Sound

Author： Kühnel W.   Franz J.   Hohm D.   Heß G.  

Publisher： S. Hirzel Verlag

ISSN： 1610-1928

Source： Acta Acustica united with Acustica, Vol.73, Iss.2, 1991-02, pp. : 90-99

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