Use of fluorescent probes to determine catalytic chain length in chemically amplified resists

Author: Frenette Mathieu   Ivan Marius G.   Scaiano J C  

Publisher: NRC Research Press

ISSN: 1480-3291

Source: Canadian Journal of Chemistry, Vol.83, Iss.6-7, 2005-06, pp. : 869-874

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract