Noise prediction and control in microelectronics clean rooms

Author： Gordon Colin G. Yazdanniyaz Amir M.

Publisher： Institute of Noise Control Engineering

ISSN： 0736-2935

Source： INTER-NOISE and NOISE-CON Congress and Conference Proceedings, Vol.1989, Iss.2, 1989-12, pp. : 593-596

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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