A review of noise issues in semiconductor clean rooms

Author： Amick H. Yazdanniyaz A.M. Pearsons K.S. Nugent R.E.

Publisher： Institute of Noise Control Engineering

ISSN： 0736-2935

Source： INTER-NOISE and NOISE-CON Congress and Conference Proceedings, Vol.1990, Iss.1, 1990-10, pp. : 247-252

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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