Thermodynamics of the Chemical Vapor Deposition of Carbides in the System TaBr5–CCl4–Cd

Author: Goncharov O.Y.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.37, Iss.3, 2001-03, pp. : 237-242

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Abstract