Distribution Coefficients in the Systems SiF4–Si2OF6and SiF4–SiOF2

Author： devyatykh G.G.   Pryakhin D.A.   Bulanov A.D.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-1685

Source： Inorganic Materials, Vol.37, Iss.4, 2001-04, pp. : 413-415

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Abstract

The liquid–vapor distribution coefficients in the SiF_4–Si_2OF_6and SiF_4–SiOF_2systems were determined between 183 and 250 K. The results were used to evaluate the enthalpies of Si_2OF_6and SiOF_2vaporization.

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