Preparation and Fine Purification of SiF4 and 28SiH4

Author： Bulanov A.D.   Balabanov V.V.   Pryakhin D.A.   Troshin O.Y.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-1685

Source： Inorganic Materials, Vol.38, Iss.3, 2002-03, pp. : 283-287

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