Chemical Vapor Deposition of Y_2O_3 Films Using Y(dpm)_3

Author: Bakovets V.V.   Levashova T.M.   Ratushnyak V.T.   Bakhturova L.F.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.38, Iss.4, 2002-04, pp. : 371-373

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract