Chemical Etching of InAs, InSb, and GaAs in H_2O_2–HBr Solutions

Author: Tomashik Z.F.   Kusyak N.V.   Tomashik V.N.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.38, Iss.5, 2002-05, pp. : 434-437

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