Preparation of Germanium Oxynitride Films in Ammonia

Author: Nakhutsrishvili I.G.   Dzhishiashvili D.A.   Mkervalishvili Z.I.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.39, Iss.8, 2003-08, pp. : 833-835

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Abstract