Hydrocarbon impurities in SiF₄ and SiH₄ prepared from it

Author： Bulanov A. Sennikov P. Krylov V. Sorochkina T. Chuprov L. Chernova O. Troshin O.

ISSN： 0020-1685

Source： Inorganic Materials, Vol.43, Iss.4, 2007-04, pp. : 364-368

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