Automation of Technological Equipment for Obtaining Multilayer Structures in an Ultrahigh Vacuum

Author： Varnakov S. N.   Lepeshev A. A.   Ovchinnikov S. G.   Parshin A. S.   Korshunov M. M.   Nevoral P.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-4412

Source： Instruments and Experimental Techniques, Vol.47, Iss.6, 2004-11, pp. : 839-843

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