Author： Rumyantsev A. Shevchenko P.
Publisher： MAIK Nauka/Interperiodica
ISSN： 0020-4412
Source： Instruments and Experimental Techniques, Vol.50, Iss.1, 2007-02, pp. : 133-137
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Abstract
The design and operating principle of an autonomous thermistor gas microflowmeter are described. The instrument can operate in constant-power and constant-temperature modes and yields output signals in the ohmic, frequency, and current forms. The autonomous operation of the flowmeter is ensured by the temperature stabilization of the controlled medium at a specified level. The results of the experimental studies of the instrument’s characteristics are presented, and the methods for their improvement are shown. Its accuracy is estimated at a level of ∼0.5% at a gas flow rate of 60–70 mg/s, and the time constant is ∼3 s. Owing to its hermetically sealed housing, the flowmeter can be used in a vacuum chamber.
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