The APΓO-2 technological facility for ion-beam-assisted deposition

Author： Guglya A.   Marchenko Yu.   Perun N.   Sassa I.   Lopatin I.   Tishchenko A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-4412

Source： Instruments and Experimental Techniques, Vol.50, Iss.3, 2007-05, pp. : 411-414

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